Eterna® ELS

misc.

https://www.globenewswire.com/news-release/2011/07/19/451488/226767/en/Axcelis-Launches-Revolutionary-Ion-Source-Technology-for-High-Current-Implant-New-Design-Extends-Source-Life-by-300-500.html

BEVERLY, Mass., July 19, 2011 (GLOBE NEWSWIRE) -- Axcelis Technologies, Inc. (Nasdaq:ACLS) today introduced the next generation Eterna ELS (Extended Life Source), the Eterna ELS3.

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